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Jobin-Yvon Uvisel spectroscopic phase-modulation ellipsometer featuring:
- 250 – 830 nm range
- automated goniometer
- 20 – 90 angle of incidence
- 50, 100, 1000 microns spot size
- millisecond time resolution
Used to measure optical constants and thickness of thin film
monolayers and multilayers. |
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Materials (typically used for):
- Semiconductors: c-Si, polysilicon, silicides, a-Si:H, III-V and
II-VI
- Dielectrics: TEOS, Oxides, Nitrides, BPSG, Oxynitrides
- Conducting: metals, ITO, TCO, TiN
- Others: DLC, Glass, High Tc Superconductors, Lipids, ProteinsL-B
films, photoresist, polymers
- Multilayers: SOI, SIMOX, optical filters
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